The development of MEMS based vector borehole gravity meter
- Gang Yu (BGP Inc., CNPC, Zhuozhou, Hebei, China) | Liangcheng Tu (China University of Geosciences (Wuhan), Hubei, China) | Fangjing Hu (China University of Geosciences (Wuhan), Hubei, China)
- Document ID
- Society of Exploration Geophysicists
- SEG International Exposition and Annual Meeting, 15-20 September, San Antonio, Texas, USA
- Publication Date
- Document Type
- Conference Paper
- 2019. Society of Exploration Geophysicists
- Density, Borehole geophysics, Logging, Gravimeter, Borehole measurements
- 3 in the last 30 days
- 3 since 2007
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A MEMS (Micro-Electro-Mechanical) based vector borehole gravity meter is being developed in China for mineral and hydrocarbon exploration. The vector borehole gravity meter is composed of a three-axis gravity sensor chip based on deep silicon etching technique, high precision capacitive displacement sensing and weak signal detection circuitry. The gravity sensing chip is a silicon-based integrated spring-mass block system. The silicon wafer is etched by micro-nanofabrication technique to form a high collimation groove. The size of the gravity detecting mass block in the sensitive unit plays a decisive role in the thermal noise level of the instrument. Deep silicon processing technique can produce thicker silicon mass block (500 μm), which can obtain larger mass block in the same area compared with traditional silicon surface processing technique (10–100 μm). The out diameter of the final tool will be 50 mm with 5 μGal resolution, 20 μGal repeatability, 10 000 mGal measurement range, 155 °C temperature and 100 MPa pressure rating.
Presentation Date: Monday, September 16, 2019
Session Start Time: 1:50 PM
Presentation Time: 3:55 PM
Location: Poster Station 4
Presentation Type: Poster
|File Size||323 KB||Number of Pages||5|
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