Input/Output, Inc. has developed a MEMS accelerometer to use as a seismic sensor for oil and gas exploration. Currently, moving coil inductive geophones are used as seismic sensors. Geophone design and performance have evolved for more than 50 years to the point that modern geophones are small, rugged, highly sensitive to motion, and produce minimal background noise. Achieving performance superior to a modern geophone with a MEMS accelerometer has been a significant technical challenge, but other benefits enabled by MEMS and accelerometer technology, such as direct digital output at the sensor, inherent high vector fidelity, and superior low-frequency response, justify the effort.

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